GB 51037-2014 GB 51037-2014 微组装生产线工艺设备安装工程施工及验收规范：英文 - 工标库
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GB 51037-2014 GB 51037-2014 微组装生产线工艺设备安装工程施工及验收规范：英文废止
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中华人民共和国住房和城乡建设部公告
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Announcement of the Minstry of Housing and Urban-Rural Development of the People&##x0027;s Republic of China
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Foreword
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1 General provisions
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2 Terms
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3 Basic requirements
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3.1 Construction conditions
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3.2 Equipment unpacking
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3.3 Equipment moving
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3.4 Equipment installation
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3.5 Debugging and commissioning of equipment
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4 Installation，debugging and commissioning of low temperature co-fined ceramic and thick film substrate production process equipment
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4.1 General requirements
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4.2 Tape caster
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4.3 Blanker
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4.4 Green tape puncher
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4.5 Laser scribing machine
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4.6 Via filling machine
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4.7 Screen printer
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4.8 Stacking machine
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4.9 Isostatic laminator
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4.10 Hot cutter
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4.11 Low temperature co-fined ceramic box furnace（LTCC box furnace）
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4.12 Thick-film belt furnace
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4.13 Laser resistor trimmer
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5 Thin film substrate production process equipment installation，debugging and commissioning
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5.1 General requirements
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5.2 Magnetic sputtering deposition system
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5.3 Vacuum evaporative copper-coated machine
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5.4 Chemical vapor deposition system
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5.5 Spin coating and hot plate system
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5.6 Exposure machine
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5.7 Developing system
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5.8 Reactive ion etching machine
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5.9 Chemical mechanical polishing machine
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6 Installation，debugging and commissioning of assembling and packaging process equipment
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6.1 General requirements
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6.2 Die attaching machine
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6.3 Die eutectic bonder
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6.4 Eutectic oven
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6.5 Wire bonder
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6.6 Flip chip bonder
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6.7 Plasma cleaner
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6.8 Selective spray coating machine
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6.9 Parallel seam welder
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6.10 Energy storage welder
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6.11 Laser welder
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7 Installation，debugging and commissioning of process inspection equipment
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7.1 General requirements
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7.2 Probe tester
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7.3 Acoustic scanner
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7.4 3D optical profiler
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7.5 Automatic optical inspector
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7.6 Laser thickness gauge
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7.7 X-ray scanner
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7.8 Chip shearing/wire pulling tester
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8 Engineering acceptance
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8.1 General requirements
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8.2 Handover acceptance
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8.3 Completed acceptance
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8.4 Disposal of reject
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Appendix A Record forms of acceptance for micro-assembling production line process equipment installation engineering
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Explanation of wording in this code
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List of quoted standards
